SINO-TECHNO FOCUS
Long-Term Relationship
Best Quality
Cost Saving
Delivery
Total Solutions
TOOL COVERAGE
ETCH / CVD / IMPLANTER / PVD / PHOTO
Lam ( 4400,4500,9400,9600,..)
TEL (8500,DRM,SCCM)
Nikon / ASML / Eaton / VARIAN / Novellus
COMPANY PRODUCTS
Spare Parts
1. Ceramic / Q' tz / SIC / Bellows / Graphite
2. AL, SIC, Pore-free, CFRP, O-ring
3. Engineering Plastics
4. Up-Graded Stepper,Scanner Chuck
5. Heater Pedestal
6. AMAT PLUS (CPR) Heater Block
7. AMAT DXZ Heater
8. LAM 4500 Confinement Ring
9. AMAT WXZ Heater
Refurbish and Repair
1. Refurbish / Up-Grade Products.
2. MCA E-Chuck / MCA Plus / Polyimide ESC / Ceramic ESC
3. RF Generator and DC Power Supply Repair
4. PRI / MECS / BROOKS / GENMARK / YASGAWA Robot Overhaul
5. EBARA / ALCATEL / KASHYMA Pump Overhaul
6. ENDURA 5500 Heater Repair or Refurbish
7. Chamber Parts ( Y2O3 & Al2O3 )
8. VARIAN Roplat & Tilter Head Overhaul
9. ETCH Bottom Match and Mini Match Overhaul
10. Novellus Heater Block Repair
11. ESC Refurbish
... 
Taiwan